Maker |
Wafer
Size |
Model |
Type |
Appearance of Equipment |
Config |
Process |
S/N |
Vintage |
Count |
KC-Tech |
12” |
KCT-W300S |
Batch |
|
SPM / FPM / SC1 |
Pre Clean
Post Clean
Oxide Wet Etch |
FAM-6024AZ |
2006 |
1 |
KCT-W300F |
Batch |
SPM / LAL / SC1 |
Pre Clean
Post Clean
Oxide Wet Etch |
KCTZ-0803-12A |
2008 |
1 |
KCT-W300S |
Batch |
SPM / BOE / SC1 |
Pre Clean
Post Clean
Oxide Wet Etch |
FAM-8002AZ |
2009 |
1 |
KCT-W300I |
Batch |
SPM1 + SPM2 + LAL(HF) + APM |
Pre Clean
Post Clean
Oxide Wet Etch |
FAM-8011AZ |
2009 |
1 |
KCT-W300F |
Batch |
SPM + LAL(HF) + APM |
Pre Clean
Post Clean
Oxide Wet Etch |
FAM-8003AZ |
2009 |
1 |
KCT-W300F |
Batch |
SPM + LAL(HF) + APM |
Pre Clean
Post Clean
Oxide Wet Etch |
SB-13005.0020 |
2009 |
1 |
