Maker |
Wafer
Size |
Model |
Type |
Appearance of Equipment |
Config |
Process |
S/N |
Vintage |
Count |
SES/
JET |
12” |
BW300F |
Batch |
|
LD-L/R-C/W-HS1-HS2-HQDR1-SC1(1)-
HQDR2-SC1(2)-HQDR3-RMMDs-ULD
|
PR Strip |
HE6030A |
2004 |
1 |
BW300F |
Batch |
HE8063A |
2006 |
1 |
BW300F |
Batch |
HE9003A |
2006 |
1 |
BW300F |
Batch |
LD-L/R-C/W-SPM1-SPM2-HQDR1-APM(1)-
APM(2)-HQDR2-DHF-QDR-F/R-RMMDs-ULD |
PR Strip |
HEA008A |
2006 |
1 |
BW3000I |
Batch |
LD-L/R-C/W-SOL1-SOL2
-IPA/DIW-QDR-F/R-RMMDs-ULD |
Organic Strip |
CE9006A |
2007 |
1 |
BW3000I |
Batch |
HE9066A |
2007 |
1 |
BWL3000I |
Batch |
BP-C/W-HF-OF-SPM-HQDR1-SC1
-HQDR2-DHF-ONB-RMMDs-LO/ULD
|
Pre Clean
Post Clean
Co Remove Clean |
|
|
|
BWL3000I |
Batch |
|
|
|
BW300F |
Batch |
SPM1 + SPM2 + APM + LAL + RMMD
|
PR Strip
Oxide Wet Etch |
|
|
|
BW300F |
Batch |
SPM1 + SPM2 + APM + LAL + RMMD
|
|
|
|
BW300F |
Batch |
ORG + ORG + IPA + QDR + DRYER |
Organic Strip |
HE9020A |
2006 |
1 |
BW300F |
Batch |
ORG + ORG + IPA + QDR + DRYER |
Organic Strip |
HE8047A |
2006 |
1 |
BW3000I |
Batch |
ORG + ORG + IPA + QDR + DRYER |
Organic Strip |
HE009A |
2007 |
1 |
BW300F |
Batch |
ORG + ORG + IPA + QDR + DRYER |
Organic Strip |
ESL003A |
2018 |
1 |
BW300F |
Batch |
ORG + ORG + IPA + QDR + DRYER
|
Organic Strip |
|
|
|
