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Maker |
Wafer
Size |
Model |
Type |
Appearance of Equipment |
Config |
Process |
S/N |
Vintage |
Count |
ZEUS |
12” |
APOLLON |
Single |
|
APM / HF
EFEM Booth, CHB Booth(Left, Right),
CSB Unit |
Pre Clean
Post Clean |
ESE000LG |
2012 |
1 |
APOLLON |
Single |
DSP / HF
EFEM Booth, CHB Booth(Left, Right),
DSP Unit / DHF+HF |
DSP Strip
Post (DSP) Clean |
ESE00IG |
2012 |
1 |
APOLLON |
Single |
APM / HF
EFEM Booth, CHB Booth(Left, Right),
CSB Unit |
Pre Clean
Post Clean |
ESE00DG |
2011 |
1 |
APOLLON |
Single |
APM / HF
EFEM Booth, CHB Booth(Left, Right),
CSB Unit |
Pre Clean
Post Clean |
ESE00CG |
2011 |
1 |
APOLLON |
Single |
APM / HF
EFEM Booth, CHB Booth(Left, Right),
CSB Unit |
Pre Clean
Post Clean |
ESE0006G |
2012 |
1 |
APOLLON |
Single |
APM / HF
EFEM Booth, CHB Booth(Left, Right),
CSB Unit |
Pre Clean
Post Clean |
ESE000KG |
2012 |
1 |
APOLLON |
Single |
APM / HF
EFEM Booth, CHB Booth(Left, Right),
CSB Unit |
Pre Clean
Post Clean |
ESE000GG |
2012 |
1 |
APOLLON |
Single |
Organic solvent |
Organic Strip |
ESD013G |
2010 |
1 |
APOLLON |
Single |
ESC / HF |
ESC Strip
Cu Clean |
SSD-3000 |
2010 |
1 |
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