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Maker |
Wafer
Size |
Model |
Type |
Appearance of Equipment |
Config |
Process |
S/N |
Vintage |
Count |
FSI
(TEL) |
12” |
Antares300 |
Single |
|
N2 + Ar Cleaning |
Post Clean |
|
2008 |
1 |
Antares300 |
Single |
N2 + Ar Cleaning |
Post Clean |
0909-0070-0506 |
2006 |
|
Antares300 |
Single |
N2 + Ar Cleaning |
Post Clean |
|
2005 |
1 |
Antares CX300 |
Single |
|
N2 + Ar Cleaning |
Post Clean |
|
|
1 |
|
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