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Item
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Detailed Contents |
Remark |
Technical Knowhow |
Refurbishment |
224 tools |
Domestic: Samsung and Hynix etc.
Oversea: China and Japan |
Cost Saving
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30%↑ cost saving compare with new equipment |
Same performance as new equipment
: Particle, E/R, Uniformity etc. |
Software
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NIWIN GUI Program, PLC/PC, SECS(Host/FDC), etc. |
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Capa. |
Clean Room |
2640㎡(800pyeong) |
NIWIN Factory: 4,500㎡ |
Refurbish |
2 System/month |
24 System/year |
Delivery |
6 Months |
Required additional production period according to parts supply |
Process Spec |
Possible to respond to customer requirements for specification
- For each Process Design Rule: E/R, Particle, Uniformity etc. |
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Refurbishment maker |
JET, TEL, KCTECH, SHIBAURA |
NIWIN used equipment : 60(8”/12”, Batch) |
Process Application |
Possible to apply process application for customer customization
- SiN Remove, PR Strip, Oxide Etch
- FEOL, BEOL, Pre, IMD, Metal Reclaim
- HSN, AL Etch, ORG Strip, etc. |
Semiconductor Wet Process |
Equipment Refurbish Procedure |
Used equipment(Fab Out) → Confirmation of Customer Specifications and Design/Manufacture for the all parts(body, frame, bath, etc.) → NIWIN software setup
(PLC, PC, SECS, FDC) → Equipment setting and Auto run test & Final Inspection before shipment
⇒ NIWIN refurbished equipment has the same performance as new equipment!
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