Footprint(WxDxH)

Small Footprint

EQP Composition

4 ~ 12Chamber(2 ~ 4CHx3 Level)

12 ~ 18Chamber(4 ~ 6CHx3 Level)

16 ~ 32Chamber(4 ~ 8CHx4 Level)

Max WPH

~530

~600

~1000

Nozzle Composition

2 Chemical Nozzle
Nano Spray Nozzle(Option)

2 Chemical Nozzle
Nano Spray Nozzle(Option)

2 Chemical Nozzle
Nano Spray Nozzle(Option)

Max 5
B/S Nozzle

Chemicals

HF+SC1, DSP+SC1, LAL+SC1

HF+SC1, DSP+SC1, LAL+SC1

HF+SC1, DSP+SC1, LAL+SC1

Robot Number

4 Hand(Transfer Robot 1ea)

4 Hand((Transfer Robot 2ea)

4 Hand((Transfer Robot 2ea)

Chamber Composition

Cup/Table/Spindle

3rd Floor / Cup Folding
Built-In Type & T/B Direct Drive

3rd Floor / Cup Folding
Built-In Type & T/B Direct Drive

4th Floor / Cup Folding
Built-In Type & T/B Direct Drive