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| Refurbished Equipment Performance |
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Year |
Maker |
Model |
Customer |
Process |
D/R |
Remark |
2022 |
SES(JET) |
BW3000F |
CO Remove Clean |
120nm |
Customer
Specification |
2022 |
SES(JET) |
BW3000F |
BEOL PR Strip AL |
120nm |
2022 |
SES(JET) |
BW3000F |
FEOL PR Strip & Clean |
120nm |
2021 |
SES(JET) |
BW3000F |
PR Strip |
120nm |
2020 |
SES(JET) |
BW3000F |
Final Clean |
120nm |
2020 |
SES(JET) |
BW3000F |
PRE-Clean |
120nm |
2019 |
SES(JET) |
BW3000F |
PR Strip |
120nm |
2019 |
SES(JET) |
BW3000F |
PR Strip |
120nm |
2018 |
SES(JET) |
BW3000I |
Gate Clean |
120nm |
2018 |
SES(JET) |
BW3000I |
SiN Remove |
120nm |
2018 |
SES(JET) |
BW3000I |
FEOL Recycle |
60nm |
2018 |
SES(JET) |
BW3000I |
Metal Recycle |
60nm |
2010~2022 |
SES |
Special |
Wet Clean |
120~200nm |
85 Tools |
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