Maker |
Wafer
Size |
Model |
Type |
Appearance of Equipment |
Config |
Process |
S/N |
Vintage |
Count |
Semes |
12” |
IRIS300 |
Single |
|
HF / LAL500 / APM |
Pre Clean
Post Clean
Oxide Wet Etch |
SC1202-2008014 |
2008 |
1 |
IRIS300 |
Single |
APM / HF |
Pre Clean
Post Clean |
SC1202-2008032 |
2009 |
1 |
IRIS300 |
Single |
HF / DSP |
DSP Strip
Post (DSP) Clean |
SC1202-2008017 |
2008 |
1 |
IRIS300 |
Single |
HF / LAL /
IPA(High Temperature) |
Pre Clean
Post Clean
Oxide Wet Etch |
SC1202-2008040 |
2009 |
1 |
IRIS300 |
Single |
APM / HF |
Pre Clean
Post Clean |
SC1202-2008029 |
2008 |
1 |
IRIS300 |
Single |
HF / ADM / APM |
SC1202-2008008 |
2008 |
1 |
IRIS300 |
Single |
LAL / APM |
Pre Clean
Post Clean
Oxide Wet Etch |
SC1202-2006022 |
2013 |
1 |
IRIS300 |
Single |
LAL / APM / DHF |
SC1202-2008003 |
2008 |
1 |
IRISV500 |
Single |
DSP / DHF /
IPA(Low Temperature) |
DSP Strip
Post (DSP) Clean
|
SC1204-2008001 |
2008 |
1 |
KSW12A |
Single |
Brush / DIW Clean /
Nano Spray / Megasonic |
Scrubber |
SC1204-2004004 |
2005 |
1 |
