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Used SCREEN/LSE/KAIJO/SES Equipment List
Maker
Wafer
Size
Model
Type
Appearance of Equipment
Config
Process
S/N
Vintage
Count
SCREEN
12”
SU3100
Single
O3 + LAL
Ozone Strip
Ozone Clean
530L00279A
2010
1
LSE
12”
SC308
Single
SCRUBBER
Post CMP Clean
Post CVD
Metal Clean
SC003-0906-0020
2009
1
SC308
SCRUBBER
SC010-0910-0028
2009
1
SC308
SCRUBBER
SC008-0909-0026
2009
1
SC308
SCRUBBER
M0009-0711H
2007
1
KAIJO
6”
RT-623A
Batch
LD-C/HF(1:99),Rinse,H3PO4,
H3PO4,DIW,Rinse
,Full Bath,Spin dryer-ULD
SiN Strip
P-965
NA
1
SES
8”
PEGASUS-NEW
Batch
LD/ULD-C/W-SOL1-SOL2-IPA-
SMF(AQUA)-QDR-F/R-RMMDs
Organic Strip
HE7058A
2005
1